00342nam a2200133Ia 4500003000400000008004100004020002700045040000800072100001700080245005100097260003300148300001500181365001200196LDD181029s9999    xx            000 0 und d  a9788184894134c1195.00  cLDD  aBrodie, Ivor 0aPhysics of micro/Nano-fabricationcIvor Brodie  aNew YorkbPlenum Pressc1992  axix, 650p.  b1195.00