00354nam a2200133Ia 4500003000400000008004100004020002700045040000800072100001900080245006400099260003000163300001500193365001200208LDD181029s9999    xx            000 0 und d  a9780815515821c220.00  cLDD  aLuttge, Regina 0aMicrofabrication for industrial applicationscRegina Luttge  aAmsterdambElsevierc2011  axvii, 289p  b220.00